スダ　サトシ   SUDA Satoshi   須田　智    所属   埼玉医科大学  医学部 国際医療センター　神経内科・脳卒中内科    職種   教授
論文種別	学術雑誌(原著)
言語種別	英語
査読の有無	査読あり
表題	Ultra-compact 32 x 32 strictly-non-blocking Si-wire optical switch with fan-out LGA interposer
掲載誌名	正式名：OPTICS EXPRESS ISSNコード：1094-4087
出版社	OPTICAL SOC AMER
巻・号・頁	23(13),17599-17606頁
著者・共著者	Ken Tanizawa,Keijiro Suzuki,Munehiro Toyama,Minoru Ohtsuka,Nobuyuki Yokoyama,Kazuyuki Matsumaro,Miyoshi Seki,Keiji Koshino,Toshio Sugaya,Satoshi Suda,Guangwei Cong,Toshio Kimura,Kazuhiro Ikeda,Shu Namiki,Hitoshi Kawashima
発行年月	2015/06
概要	We demonstrate a 32 x 32 path-independent-insertion-loss optical path switch that integrates 1024 thermooptic Mach-Zehnder switches and 961 intersections on a small, 11 x 25 mm(2) die. The switch is fabricated on a 300-mm-diameter silicon-on-insulator wafer by a complementary metal-oxide semiconductor-compatible process with advanced ArF immersion lithography. For reliable electrical packaging, the switch chip is flip-chip bonded to a ceramic interposer that arranges the electrodes in a 0.5-mm pitch land grid array. The on-chip loss is measured to be 15.8 +/- 1.0 dB, and successful switching is demonstrated for digital-coherent 43-Gb/s QPSK signals. The total crosstalk of the switch is estimated to be less than -20 dB at the center wavelength of 1545 nm. The bandwidth narrowing caused by dimensional errors that arise during fabrication is discussed. (C) 2015 Optical Society of America
DOI	10.1364/OE.23.017599
PMID	26191767